Memory of the Yangtse River shows the manufacturing technology that puts chip
Memory of the Yangtse River showed the production that puts chip to use distinctive Xtacking technology, its are specific manufacturing technology is as follows (put chip to be with producing 3D NAND to shine exemple) :
The filmy and deposit pile of ONON layer: Ordinal the film that has ONON layer on silicon chip is deposit.
Extremely profound wide than engraving corrode: Use extremely profound wide undertake etching to all layers than cutting corrode facility, form countless even groove aperture to list. As the rise of memory pile number of plies, of groove aperture deep wide rise than also can be being climbed subsequently, this makes etch the difficulty of craft is greater and greater. For example, the groove hole depth of 32/48 layer is wide than for 40: 1, 64 for 60: 1, 96 for 70: 1. Current, of home in small company dominant is worn extremely profound wide than etching the research and development of equipment. This company developed independently 2021 60: 1 extremely profound than cutting corrode engine, undertaking the line guides yield, produce a line in order to use 64 at living forever with 128. Additional, string together pile through using (String Stacking) technology, rise two series connection that fold caboodle in a certain position namely, it is easier to can make the formation of passageway aperture faster. 128 when the Yangtse River stores shine put even if will two 64 string together pile to come true.
A flight of stairs engraves corrode: Through a flight of stairs to each quarter corrode forms structure of shape of a flight of stairs, this one measure is relatively simple, nonexistent subproblem blocking neck.
Etch again: Use again extremely profound wide undertake etching than cutting corrode facility, sky of will all passageway lists each other to part.
Nitride cleans and word line deposit: Nitride of purify of use nitride clear lotion layer, deposit of line of word of the juniorest travel and tungsten of fill of osculatory aperture deposit, have location UniCom. In this measure ” extremely profound the broad line that compare a word and fill of osculatory aperture tungsten ” existence is blocked by day beauty the problem of the neck. Increase as number of plies of 3D NAND pile, what a flight of stairs contacts aperture is deep wide achieve than meeting 40: 1 to 60: 1 above, the growth that this changes titanium barrier layer to nitrogen and extremely profound wide compared tungsten fill raised taller requirement. The rises to still need to have challenge sex more WL circuitry fill of pile number of plies, include taller deep wide longer than mixing transverse stuff, these new technologies should come true through advanced metallic CVD or ALD. The country is at present immanent ” extremely profound the broad line that compare a word and fill of osculatory aperture tungsten ” equipment respect by in research and development of small company dominant.
Xtacking technology location of periphery circuit park over, do not take up actual core is accumulated one-sidedly, increased packing density; Circuit of location, periphery is respectively on two brilliant circle collateral treatment, shortened production is periodic; Periphery circuit can be machined alone, OK and as mutual as location independent design, production, eliminated the design between both, craft diversionary, be helpful for coming true more high-powered. Periphery circuit area and location area are almost equal, opposite for density of periphery circuit transistor can be compared low, node of craft of general use 50nm can satisfy requirement, highest also need not exceed 28nm craft, need not advanced the photoetching machine that makes Cheng.
Pass ceaseless technical research and development and innovation, memory of the Yangtse River is shining put chip striking progress was obtained on manufacturing technology, for homebred showed the evolution that puts chip to make important contribution. But those who need an attention is, shan Cunxin piece manufacturing technology is very sophisticated, involve numerous technicality and high-end equipment, and the technology is developing ceaselessly and progress, practical manufacturing technology may as the technology update and change somewhat.